Development of Micro Lateral Force Sensor Using Tunnelling Current
نویسندگان
چکیده
منابع مشابه
Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing
Measurement tasks of modern microand nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which...
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Fabrice F.C. Duval a,∗, Stephen A. Wilson a, Graham Ensell b, Nicolas M.P. Evanno c, Markys G. Cain d, Roger W. Whatmore a,1 a School of Industrial and Manufacturing Science, Cranfield University, Bedfordshire MK43 0AL, UK b INNOS Limited, Mountbatten Building, Highfield, Southampton, Hampshire SO17 1BJ, UK c Rolls-Royce Plc, Strategic Research Centre, Sina-28, P.O. Box 31, Derby DE24 8BJ, UK d...
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
سال: 2006
ISSN: 0387-5024,1884-8354
DOI: 10.1299/kikaic.72.975